Implant Species

Dose atoms/cm²

Energy

Substrate

¹H

1e15-5e15

60keV

GaN, InP, InGaAs, InAlAs, InGaAsP, GaAs,? AlAs, Al_0.27Ga_0.73As, Al_0.31Ga_0.69As, Al_0.34Ga_0.66As, Al_0.45Ga_0.55As, Al_0.47Ga_0.53As, Al_0.73Ga_0.27As

²D

1e15

50keV

InP, InGaP, AlAs, GaAs, Al_0.11Ga_0.89As, Al_0.25Ga_0.75As, Al_0.35Ga_0.65As, Al_0.55Ga_0.45As, Al_0.65Ga_0.35As

⁷Li

1e14-5e14

100-150keV

InP

⁹Be

1e14

50keV

GaAs, AlAs, InP, AlInP, InGaAs, InGap, InAlAs, InGaAsP, Al_0.22Ga_0.78As, Al_0.27Ga_0.73As, Al_0.31Ga_0.69As, Al_0.35Ga_0.65As, Al_0.45Ga_0.55As, Al_0.49Ga_0.51As, Al_0.73Ga_0.27As

¹²C

1e15

100keV

GaN, InP, InAlAs, GaAs, InGaAs, InGaAsP, Al_0.10Ga_0.90As, Al_0.22Ga_0.78As, Al_0.28Ga_0.72As, Al_0.35Ga_0.65As, Al_0.49Ga_0.51As, Al_0.55Ga_0.45As, Al_0.65Ga_0.35As

¹⁶O

1e15

100keV

GaN, AlGaN, InP, GaAs, InGaP, InGaAs, InAlAs, InGaAsP, Al_0.11Ga_0.89As, Al_0.25Ga_0.75As, Al_0.28Ga_0.72As, Al_0.35Ga_0.65As, Al_0.55Ga_0.45As, Al_0.65Ga_0.35As,

¹⁸O

1e15

160keV

InP, InGaP, AlAs, GaAs, Al_0.11Ga_0.89As, Al_0.25Ga_0.75As, Al_0.35Ga_0.65As, Al_0.55Ga_0.45As, Al_0.65Ga_0.35As

¹⁹F

1.24e15

200keV

GaAs

²³Na

1e14

100keV

GaAs, InP, Al_0.22Ga_0.78As, Al_0.28Ga_0.72As, Al_0.35Ga_0.65As, Al_0.49Ga_0.51As

²⁴Mg

1e15

100keV

GaN, AlGaN, GaAs, InAs, InP, InGaAs, InGaAsP

²⁷Al

2e15

300keV

GaAs, InP

²⁸Si

1e14-1e15

120keV

GaN, AlGaN, GaAs, InP, InGaAs, InGaP,? InAlAs, AlInP, InGaAsP, Al_0.10Ga_0.90As, Al_0.22Ga_0.78As, Al_0.28Ga_0.72As, Al_0.30Ga_0.70As, Al_0.35Ga_0.65As, Al_0.40Ga_0.60As, Al_0.49Ga_0.51As, Al_0.52Ga_0.48As

²⁹Si

3e12

60keV

GaAs

³²S

5e14

180keV

InP, GaAs, InGaAs, InGaAsP

³⁴S

1e14

120keV

InP, InGaAs, Al_0.11Ga_0.89As, Al_0.30Ga_0.70As, Al_0.40Ga_0.60As, Al_0.52Ga_0.48As

³⁵Cl

7.5e13-5e14

150keV

GaAs, InP, Al_0.22Ga_0.78As, Al_0.28Ga_0.72As, Al_0.35Ga_0.65As, Al_0.49Ga_0.51As

³⁹K

1e14

100keV

InP

⁴⁸Ti

1e15

180keV

GaAs, InP, InAs, InGaAs, InGaAsP

⁵¹V

1e15

100keV

GaAs, InP

⁵⁵Mn

1e15

100keV

InP

⁵⁶Fe

1e15

150keV

GaAs, InP, InAs, InGaAs, Al_0.11Ga_0.89As, Al_0.30Ga_0.70As, Al_0.40Ga_0.60As, Al_0.52Ga_0.48As

⁵⁸Ni

1e15

160keV

InP

⁶³Cu

5e15

150keV

GaAs, InP

⁶⁴Zn

1e14-1e15

180keV

AlAs, InP, InAs, InGaP, InGaAs, InGaAsP, Al_0.10Ga_0.90As, Al_0.15Ga_0.85As, Al_0.22Ga_0.78As, Al_0.27Ga_0.73As, Al_0.31Ga_0.69As, Al_0.35Ga_0.65As, Al_0.45Ga_0.55As, Al_0.49Ga_0.51As

⁸⁰Se

1.1e15

InP, InGaAs, InAlAs, InGaAsP

¹⁰⁴Ru

7.3e14

200keV

InP

¹¹¹Cd

4.83e14

InP

¹¹⁴Cd

1e13-1e15

180keV

InP, GaAs

¹¹⁸Sn

1.05e15

InP, InGaAs, InAlAs, InGaAsP

¹²⁰Sn

1e14-1e15

360keV

GaAs, InP, InGaAsP, Al_0.11Ga_0.89As, Al_0.30Ga_0.70As, Al_0.44Ga_0.56As, Al_0.52Ga_0.48As

¹²¹Sb

1e13-5e15

300keV

InAs, GaAs, InP

¹²⁸Te

4.84e14

150keV

InP

¹⁹⁷Au

2.2e15

700keV-2meV

InP, GaAs, InGaAs